Name=PLC1 LE MaxSigCnt=115 DataFormat=Hex [SigData] 00 M1 Measured value (PV) 01 AA Output 1 status 02 AB Output 2 status 03 AC Output 3 status 04 AD Output 4 status 05 AE Output 5 status 06 AF Output 6 status 07 AG Output 7 status 08 AH Output 8 status 09 B1 Burnout 0A ER Error code 0A.0 ER Adjusted data destruction error 0A.1 ER EEPROM write error 0A.2 ER EEPROM time out error 0A.3 ER Input capture hardware error 0A.4 ER Emptiness adjustment execution error 0A.5 ER Span setting by actual liquid error 0A.6 ER Span adjustment execution error 0A.7 ER Number of wafer processing times error 0A.8 ER Output setting by actual liquid error 0A.9 ER Linearizing table creation error 0B ID ID data 0C ID ID data 0D ID ID data 0E MS Specific gravity monitor 0F ML Scale low monitor 10 MH Scale high monitor 11 HP Peak hold monitor 12 HQ Bottom hold monitor 13 MW Number of wafer processing times monitor 14 MZ Amount of emptiness correction monitor 15 A1 Output 1 set value 16 A2 Output 2 set value 17 A3 Output 3 set value 18 A4 Output 4 set value 19 A5 Output 5 set value 1A A6 Output 6 set value 1B A7 Output 7 set value 1C A8 Output 8 set value 1D A9 Actual liquid output setting 1E AZ Emptiness adjustment 1F WT Number of wafer processing times 20 CW Initializing the number of wafer processing times 21 HR Hold reset 22 IR Interlock release 23 LK Set data lock 24 IS Default setting 25 EC Error release 26 LU Decimal point position selection 27 LT Number of linearizing table setting 28 L0 Linearizing table setting 0 29 L1 Linearizing table setting 1 2A L2 Linearizing table setting 2 2B L3 Linearizing table setting 3 2C L4 Linearizing table setting 4 2D L5 Linearizing table setting 5 2E L6 Linearizing table setting 6 2F L7 Linearizing table setting 7 30 L8 Linearizing table setting 8 31 L9 Linearizing table setting 9 32 LA Linearizing table setting 10 33 F1 Digital filter 34 XA Output 1 type selection 35 DA Output 1 deviation value setting 36 QA Output 1 interlocking function selection 37 NA Output 1 a/b contact selection 38 HA Output 1 differential gap 39 TA Output 1 timer setting 3A XB Output 2 type selection 3B DB Output 2 deviation value setting 3C QB Output 2 interlocking function selection 3D NB Output 2 a/b contact selection 3E HB Output 2 differential gap 3F TB Output 2 timer setting 40 XC Output 3 type selection 41 DC Output 3 deviation value setting 42 QC Output 3 interlocking function selection 43 NC Output 3 a/b contact selection 44 HC Output 3 differential gap 45 TC Output 3 timer setting 46 XD Output 4 type selection 47 DD Output 4 deviation value setting 48 QD Output 4 interlocking function selection 49 ND Output 4 a/b contact selection 4A HD Output 4 differential gap 4B TD Output 4 timer setting 4C XE Output 5 type selection 4D DE Output 5 deviation value setting 4E QE Output 5 interlocking function selection 4F NE Output 5 a/b contact selection 50 HE Output 5 differential gap 51 TE Output 5 timer setting 52 XF Output 6 type selection 53 DF Output 6 deviation value setting 54 QF Output 6 interlocking function selection 55 NF Output 6 a/b contact selection 56 HF Output 6 differential gap 57 TF Output 6 timer setting 58 XG Output 7 type selection 59 DG Output 7 deviation value setting 5A QG Output 7 interlocking function selection 5B NG Output 7 a/b contact selection 5C HG Output 7 differential gap 5D TG Output 7 timer setting 5E XH Output 8 type selection 5F DH Output 8 deviation value setting 60 QH Output 8 interlocking function selection 61 NH Output 8 a/b contact selection 62 HH Output 8 differential gap 63 TH Output 8 timer setting 64 HV Monitor output high 65 HW Monitor output low 66 EG End specific gravity setting 67 SW Number of wafer processing times setting 68 XX Scale low 69 SG Specific gravity setting 6A J1 Scale 1 actual liquid setting 6B J2 Scale 2 actual liquid setting 6C J3 Correction on the low limit side by actual liquid 2 6D J4 Correction on the high limit side by actual liquid 2 6E UN Unit setting 6F SP Specific gravity setting transfer 70 SS Specific gravity correction function selection 71 DS DI function selection 72 MM Volume/level display selection [SigDataEnd]